The moving assembly for recovering a guard includes: a recovery container including a first recovery container disposed around a substrate support and a second recovery container disposed concentrically with the first recovery container on an inner side of the first recovery container; and a lifting driver connected to the first recovery container and the second recovery container and lifting the first recovery container and the second recovery container, in which the lifting driver includes: a motor; a drive shaft connected to the motor and rotating in a first direction; a first shaft connected to the first recovery container and extending in a second direction perpendicular to the first direction; a second shaft connected to the second recovery container and extending in a second direction; a first clutch connecting the drive shaft and the first shaft; and a second clutch connecting the drive shaft and the second shaft.

    用于回收防护件的移动组件包括:回收容器,包括第一回收容器和第二回收容器,第一回收容器设置成围绕基板支承件,第二回收容器与第一回收容器同心地设置在第一回收容器的内侧;以及升降驱动器,连接到第一回收容器和第二回收容器并使第一回收容器和第二回收容器升降,其中,升降驱动器包括:电机;驱动轴,连接到电机并且在第一方向上旋转;第一轴,连接到第一回收容器并且在垂直于第一方向的第二方向上延伸;第二轴,连接到第二回收容器并且在第二方向上延伸;第一离合器,连接驱动轴和第一轴;以及第二离合器,连接驱动轴和第二轴。


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    Title :

    Moving assembly for recovering protective member and substrate processing apparatus


    Additional title:

    回收防护件用移动组件及基板处理装置


    Contributors:
    SON WON SIK (author) / HEO PIL KYUN (author) / HWANG HO JONG (author)

    Publication date :

    2023-12-19


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last




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