The invention discloses an MEMS pneumatic control microsystem based on a peristaltic electrode, and relates to the field of micro aircraft control. The system comprises an actuator, a transmitter, a control surface and a feedback device, wherein the actuator mainly comprises a peristaltic electrode, a driving arm and a displacement shuttle structure; the transmitter comprises a transmission beam, a rotating groove and a lever structure; the control surface comprises a fixed clamping groove and a vertical wing, and the trajectory of the aircraft is regulated and controlled by adjusting the deflection angle of the vertical wing; the feedback device comprises a deflection beam, a diffusion resistor and a fixed anchor point, and measurement of complex aerodynamic lift force is realized by adopting the characteristic that tiny stress change is sensitive. The peristaltic electrode structure is used as a power generation part of the actuator, by means of the characteristics that the peristaltic electrode structure can accumulate force and displace, generation of high aerodynamic lift force is achieved, and meanwhile the overall area of a system is reduced. Feedback adjustment is carried out by means of the piezoresistive sensor, the complex aerodynamic lift measuring process is reduced, and meanwhile assistance is provided for self-adjustment of the system.
本发明公开了一种基于蠕动电极的MEMS气动控制微系统,涉及微型飞行器控制领域。该系统包括致动器、传递器、控制面及反馈器,致动器主要包括蠕动电极、驱动臂和位移梭结构;传递器包括传递梁、旋转槽和杠杆结构;控制面包括固定卡槽和垂直机翼,通过对垂直机翼的偏转角度的调节来完成对飞行器轨迹的调控;反馈器包括偏转梁、扩散电阻和固定锚点,采用微小应力变化敏感的特点来实现对复杂的气动升力的测量。本发明使用蠕动电极结构作为致动器的动力产生部分,借助其可积累力和位移的特点,实现了高的气动升力的产生,同时减小了系统的整体面积。借助压阻式传感器进行反馈调节,减少了复杂的气动升力的测量过程,同时也为系统的自调节提供了帮助。
Micro-electromechanical system (MEMS) pneumatic control microsystem based on peristaltic electrode
一种基于蠕动电极的MEMS气动控制微系统
2023-09-22
Patent
Electronic Resource
Chinese
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