The invention relates to a base tool for supporting and carrying an electrostatic chuck assembly, and belongs to the technical field of semiconductor equipment. The base tool comprises a base, and a bearing piece is arranged on the base; the bearing piece is in a vertical barrel shape, a bearing face is formed on the upper edge of the bearing piece, the outer side of the bearing face extends upwards to form a side blocking wall, and a space defined by the side blocking wall is matched with the electrostatic chuck assembly in shape; a pipeline avoiding groove used for accommodating an external pipeline of the electrostatic chuck assembly is formed in the side face of the bearing piece from top to bottom; handles are arranged on the two opposite sides of the bearing piece. According to the scheme, the working efficiency when the electrostatic chuck assembly is disassembled and assembled can be improved, the problem that the surface of the electrostatic chuck assembly is possibly scratched or collided in the storage and carrying process after the electrostatic chuck assembly is disassembled from an equipment machine table is solved, the effect of protecting the electrostatic chuck assembly and an external pipeline structure of the electrostatic chuck assembly is achieved, the service life is prolonged, and inspection and maintenance of the electrostatic chuck assembly are facilitated.

    本发明涉及一种用于支撑与搬运静电卡盘组件的底座工装,属于半导体设备技术领域,包括底座,底座上设置有承托件;承托件呈竖立的筒状,承托件的上缘形成有承托面,在承托面外侧向上延伸有侧挡壁,侧挡壁围成的空间与静电卡盘组件的形状相匹配;在承托件的侧面由上至下开设有用于容纳静电卡盘组件的外接管线的管线避让槽;在承托件的相对的两侧设置有把手。本方案可提高拆装静电卡盘组件时的工作效率,解决静电卡盘组件从设备机台拆卸后存放与搬运过程中可能导致表面划伤或磕碰的问题,起到保护静电卡盘组件及其外接管线结构的作用,延长使用寿命,便于静电卡盘组件的检查与维护。


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    Title :

    Base tool for supporting and carrying electrostatic chuck assembly


    Additional title:

    一种用于支撑与搬运静电卡盘组件的底座工装


    Contributors:
    GUO XIN (author) / ZHANG JIAN (author) / LI WEIYANG (author)

    Publication date :

    2023-08-08


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS



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