The invention relates to the technical field of semiconductor production, in particular to an auxiliary maintenance device for semiconductor grinding equipment, which comprises a top plate and a bottom plate, the top plate and the bottom plate are connected through a lifting frame, a moving plate is mounted in the top plate, a carrying mechanism is mounted at one end of the moving plate, and an auxiliary fixing mechanism is mounted on one side, away from the carrying mechanism, of the top plate; a limiting mechanism for limiting and fixing is installed on the outer wall of the bottom plate. According to the silicon wafer grinding machine, when a worker needs to carry and maintain parts of the silicon wafer grinding machine, a grinding disc can be clamped and fixed through the arranged carrying mechanism and clamping blocks installed on the outer walls of two rotating rods, the grinding disc is placed on the top of a top plate, and the grinding disc is moved by means of rolling wheels at the bottom of a bottom plate; the device can carry the grinding disc or directly carry out maintenance detection on the grinding disc at the top of the top plate, the auxiliary maintenance effect is achieved, the maintenance efficiency of workers on the silicon wafer grinding machine is improved, and the danger of the workers in the part carrying process is reduced.

    本发明涉及半导体生产技术领域,具体的公开了半导体研磨设备的辅助维修装置,包括顶板和底板,顶板和底板之间通过升降架连接,顶板内部安装移动板,移动板一端安装搬运机构,顶板远离搬运机构的一侧安装辅助固定机构,底板外壁安装限位固定的限位机构。该发明中,在工作人员需要对硅片研磨机的零部件进行搬运维修时,通过设置的搬运机构,两个转动杆外壁安装的夹块能够对研磨盘进行夹持固定,并将其放置在顶板的顶部,借助底板底部的滚轮移动,使得装置能够对研磨盘进行搬运或直接在顶板顶部对研磨盘进行维修检测,达到辅助维修的效果,提高工作人员对硅片研磨机的维修效率,降低工作人员在搬运零部件过程中的危险性。


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    Title :

    Auxiliary maintenance device of semiconductor grinding equipment


    Additional title:

    半导体研磨设备的辅助维修装置


    Contributors:
    WU QIXIANG (author)

    Publication date :

    2023-06-23


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B65D Behältnisse zur Lagerung oder zum Transport von Gegenständen oder Materialien [Container], z.B. Säcke, Beutel, Fässer, Flaschen, Dosen, Kästen, Büchsen, Schachteln, Packkörbe, Tonnen, Gläser, Flüssigkeitsbehälter, Trichtersilos, Transportbehälter , CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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