The invention discloses an ultrahigh vacuum low-temperature sample transfer operation experiment system which comprises a micro-operation vacuum cavity main system unit, a sample refrigeration and temperature control unit, a parameter reading unit, a vacuum equipment control unit and an experiment unit. The micro-operation vacuum cavity main system unit comprises a micro-operation vacuum cavity and a magnetic drive ultrahigh vacuum mechanical arm, and a vacuum low-temperature sample table and a vacuum low-temperature bearing table are arranged in the cavity. The vacuum equipment control unit, the sample refrigeration and temperature control unit and the parameter reading unit provided by the invention can enable the sample to be tested to reach a vacuum and low-temperature state. And the ultrahigh vacuum mechanical arm transfers the to-be-tested sample to the to-be-tested instrument. Therefore, the transfer operation experiment of ultrahigh vacuum and low-temperature samples is completed.

    本发明公开了一种超高真空低温样品转移操作实验系统,包括微操真空腔主系统单元,样品制冷及温度控制单元,参数读取单元,真空设备控制单元及实验单元。微操真空腔主系统单元包括微操真空腔体,磁力驱动超高真空机械臂,腔体内部设置有真空低温样品台及真空低温承载台。发明提供的真空设备控制单元,样品制冷及温度控制单元与参数读取单元可以使得待测样品达到真空、低温状态。超高真空机械臂将待测样品转移到待测仪器。从而完成对超高真空、低温样品的转移操作实验。


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    Title :

    Ultrahigh vacuum low-temperature sample transfer operation experiment system


    Additional title:

    一种超高真空低温样品转移操作实验系统


    Contributors:
    HAO JIALONG (author)

    Publication date :

    2023-03-14


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B64G Raumfahrt , COSMONAUTICS



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    Ultrahigh Vacuum Techniques

    W. J. Lange / J. H. Singleton | NTIS | 1964


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