The invention provides atomic oxygen simulation equipment based on a Hall principle, which comprises an oxygen supply system, an ion absorption electrode, a Hall ion source, an electron source, a power supply, a vacuum pumping unit, a test bed and a true air container, and is characterized in that the power supply is connected with the Hall ion source, and the ion source and the ion absorption electrode are arranged on an air path of the Hall ion source; the Hall ion source is introduced into the oxygen supply system, oxygen is ionized to generate oxygen ions, the oxygen ions are emitted under the action of an electric field and a magnetic field to be led out of the Hall ion source, and electrons are emitted through the electron source on a gas path to neutralize the oxygen ions to form atomic oxygen. Oxygen ions and electrons which are not neutralized are absorbed by the ion absorption electrode under the action of the deflection electric field, atomic oxygen is fed into the test bed to act on an atomic oxygen test sample, and the gas path of the Hall ion source, the ion absorption electrode of the ion source and the test bed run in the vacuum container. According to the atomic oxygen simulation equipment based on the Hall principle, the atomic oxygen proportion of a neutral atomic oxygen beam is high; the atomic oxygen flux is convenient to adjust; and the device is not provided with a microwave component and has no harm to the body of a tester.

    本发明提供的一种基于霍尔原理的原子氧模拟设备,包括氧气供给系统、离子吸收极、霍尔离子源、电子源、电源、真空抽气机组、试验台架和真容空器,电源与霍尔离子源相连,所述霍尔离子源的气路上设置离子源和离子吸收极,由供氧系统通入霍尔离子源把的氧气经离化产生氧离子,氧离子通过电场和磁场的作用发射氧离子引出霍尔离子源,在气路上通过电子源发射电子中和氧离子成原子氧,未被中和的氧离子和电子在偏转电场的作用下被离子吸收电极吸收,原子氧被送入试验台架的作用在原子氧测试样品上,所述霍尔离子源的气路、离子源离子吸收极、试验台架在真空容器中运行。本发明的一种基于霍尔原理的原子氧模拟设备,中性原子氧束流原子氧占比高;原子氧通量便于调节;且装置没有微波组件,对试验人员身体无危害。


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    Title :

    Atomic oxygen simulation equipment based on Hall principle


    Additional title:

    一种基于霍尔原理的原子氧模拟设备


    Contributors:
    BAI SHU (author) / LONG JIANFEI (author) / GUO NING (author) / XU LUXIANG (author)

    Publication date :

    2022-12-27


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B64G Raumfahrt , COSMONAUTICS



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