The invention provides a capacitive micromechanical ultrasonic transduction unit, a preparation method thereof, a panel and a device, and belongs to the technical field of ultrasonic imaging. The capacitive micro-mechanical ultrasonic transduction unit comprises a first electrode, a vibrating diaphragm layer and a second electrode which are sequentially arranged from bottom to top, a cavity is formed between the first electrode and the vibrating diaphragm layer, the capacitive micro-mechanical ultrasonic transduction unit further comprises a third electrode located on the side, close to the cavity, of the vibrating diaphragm layer, and the second electrode is located on the side, close to the cavity, of the vibrating diaphragm layer. The orthographic projection of the third electrode on the first electrode covers a part of the orthographic projection of the cavity on the first electrode. According to the technical scheme, conversion of the frequency of the ultrasonic waves emitted by the capacitive micromechanical ultrasonic transduction unit can be achieved.
本公开提供了一种电容式微机械超声换能单元及其制备方法、面板、装置,属于超声成像技术领域。电容式微机械超声换能单元,包括由下至上依次设置的第一电极、振膜层和第二电极,所述第一电极和所述振膜层之间存在空腔,其中,所述电容式微机械超声换能单元还包括:位于所述振膜层靠近所述空腔一侧的第三电极,所述第三电极在所述第一电极上的正投影覆盖所述空腔在所述第一电极上的正投影的一部分。本公开的技术方案能够实现电容式微机械超声换能单元发出的超声波的频率的转换。
Capacitive micro-mechanical ultrasonic transduction unit, preparation method thereof, panel and device
电容式微机械超声换能单元及其制备方法、面板、装置
2022-12-09
Patent
Electronic Resource
Chinese
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