The invention discloses a corrugated pipe lifting device suitable for an auxiliary chamber of a hard-shaft single crystal furnace, which comprises a base, one end of the base is connected with a rack, the other end of the base is connected with a flat bottom plate, and the center of the flat bottom plate is provided with a center hole allowing an extension pipe to pass through; a bellows; and the two linear driving mechanisms are symmetrically located on the two sides of the corrugated pipe, the upper ends of the linear driving mechanisms are installed below the flat bottom plate, the lower ends of the linear driving mechanisms are connected with the lower end of the corrugated pipe, and the linear driving mechanisms drive the lower end of the corrugated pipe to move up and down in the direction perpendicular to the upper end face of the auxiliary chamber. The corrugated pipe is driven by the linear driving mechanism to linearly move up and down, so that the corrugated pipe and the auxiliary chamber are switched between a separation state and a combination state; the problems of lateral displacement of the corrugated pipe in the horizontal direction, towing of the sealing position of the lip part of the sealing ring, premature abrasion and fatigue caused by arc motion of the end part of a lever mechanism in the prior art are effectively solved, and the service life of the corrugated pipe is prolonged.
本发明公开了一种适用于硬轴单晶炉副室的波纹管提升装置,包括:底座,底座的一端与机架连接,其另一端与平底板连接,平底板的中心处开设容许延长管通过的中心孔;波纹管;直线驱动机构,两个直线驱动机构对称地位于波纹管的两侧,直线驱动机构的上端安装在平底板下方,直线驱动机构的下端与波纹管的下端连接,直线驱动机构驱动波纹管的下端在垂直于副室上端面方向上下运动。本发明通过直线驱动机构驱动波纹管上下直线运动,以实现波纹管与副室在脱离状态和结合状态之间切换,有效解决现有技术中杠杆机构的端部圆弧运动导致波纹管形成水平方向上的侧向位移、密封圈唇部密封位置的拖带、过早磨损以及疲劳的问题,延长波纹管的使用寿命。
Corrugated pipe lifting device suitable for auxiliary chamber of hard-shaft single crystal furnace
适用于硬轴单晶炉副室的波纹管提升装置
2022-11-01
Patent
Electronic Resource
Chinese
IPC: | C30B SINGLE-CRYSTAL GROWTH , Züchten von Einkristallen / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
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