A guide mechanism for a crown block comprises a guide part and an upper guide rail arranged above the guide part, the guide part comprises a sliding rail arranged in the center of a connecting base at the top of the crown block, the sliding rail is connected with a crown block guide wheel assembly in a sliding mode, and the crown block guide wheel assembly is hinged to a swing executing piece through a connecting block with a rounded rectangular groove. The swing executing piece is driven by a driving motor, a left turning limiting block, a middle section limiting block and a right turning limiting block are arranged on the left side, the middle portion and the right side of the connecting base respectively, and the upper guide rail comprises three sections of vertical beams. According to the invention, the collision vibration of the crown block during turning is avoided, the wafer is prevented from being damaged due to vibration, meanwhile, the generation of fine particles is avoided, and the environmental use requirement of a dust-free room is ensured.
一种用于天车的导向机构,包括导向部和设在导向部上方的上部导轨,所述导向部包括设在天车顶部连接座中央的滑轨,所述滑轨上滑动连接有天车导向轮组件,所述天车导向轮组件通过一带圆角矩形槽的连接块铰接摇摆执行件,所述摇摆执行件通过驱动电机进行驱动,所述连接座的左侧、中部、右侧分别设有左转弯限位块、中间段限位块、右转弯限位块,所述上部导轨包括3段竖梁。本发明解决了天车在过弯时的碰撞震动,避免晶圆因震动而受损,同时避免了细小粒子的产生,保证了无尘室的环境使用要求。
Guide mechanism for crown block
一种用于天车的导向机构
2022-04-19
Patent
Electronic Resource
Chinese
IPC: | B66C Krane , CRANES |
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