The invention relates to the field of semiconductor production, in particular to a base plate lifting mechanism. The base plate lifting mechanism comprises a bearing table, a pin, a pin mounting ring,a lifting base, a lifting drive device and a lifting transmission assembly, wherein the lifting base is driven by the lifting drive base to ascend and descend; the lifting drive device is used for transmitting force moment through the lifting transmission assembly; the upper end of the lifting base is fixedly connected to the pin mounting ring; the bearing table is arranged above the pin mountingring; the pin is arranged on the pin mounting ring in the peripheral direction; a through hole for allowing the pin to pass through is formed in the bearing table in the peripheral direction; the bearing table is equipped with a fixed pin and a movable clamping pin; and the base plate is fixed by the fixed pin and the clamping pin. The base plate lifting mechanism can effectively prevent a base plate from being damaged, and can precisely transfer the base plate.

    本发明涉及半导体生产领域,具体地说是一种基板升降机构,包括承载台、pin针、pin针安装环、升降座、升降驱动装置和升降传动组件,其中所述升降座通过所述升降驱动装置驱动升降,且所述升降驱动装置通过所述升降传动组件递力矩,所述升降座上端与所述pin针安装环固连,在所述pin针安装环上方设有承载台,并且所述pin针安装环上沿着圆周方向设有pin针,所述承载台上沿着圆周方向设有供所述pin针穿过的通孔,另外所述承载台设有固定pin和可转动的夹持pin,且基板通过所述固定pin和夹持pin固定。本发明可有效防止基板损伤,且能够精准传送基板。


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    Title :

    Base plate lifting mechanism


    Additional title:

    基板升降机构


    Contributors:
    ZHANG WEIYE (author) / PENG BO (author) / ZHENG YUNLONG (author)

    Publication date :

    2020-11-20


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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