Methods, systems, and apparatuses are disclosed for the selective and controlled removal of debris from specific areas of a substrate outer surface without adversely impacting the substrate outer surface, including substrate outer surface coatings, and returning an actual substrate outer surface profile containing affixed debris to a predetermined substrate outer surface profile by comparing a library of predetermined profiles to an actual substrate outer surface profile in real time.
本发明涉及机器人激光器和为了环境收益的真空清洁。公开了用于选择性且受控制地从基板外表面(包括基板外表面涂层)的特定区域去除碎屑而对基板外表面没有不利影响并且通过实时将预定轮廓的库与实际基板外表面轮廓进行比较来使包含附连碎屑的实际基板外表面轮廓复原成预定基板外表面轮廓的方法、系统和设备。
ROBOTIC LASER AND VACUUM CLEANING FOR ENVIRONMENTAL GAINS
机器人激光器和为了环境收益的真空清洁
2020-08-18
Patent
Electronic Resource
Chinese
ROBOTIC LASER AND VACUUM CLEANING FOR ENVIRONMENTAL GAINS
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