The invention provides an overhead hoist transfer and a material conveying device. The overhead hoist transfer comprises a traveling assembly, a grabbing assembly, a lifting mechanism, a first detection device and a control device. The traveling assembly is capable of moving along a suspended track. The grabbing assembly is used for grabbing or releasing a front opening unified pod. The lifting mechanism is connected between the traveling assembly and the grabbing assembly and is used for driving the grabbing assembly to move in the vertical direction. The first detection device is located onone side of the grabbing assembly in the horizontal direction, is connected with the grabbing assembly and is used for detecting whether an obstacle exists within a preset range under the first detection device or not and sending a first signal when the obstacle exists within the preset range under the first detection device. The control device is used for controlling the grabbing assembly to maintain the released state when the first signal is received. According to the overhead hoist transfer and the material conveying device, the safety accident caused by the fact that a cover body of the front opening unified pod is not closed can be avoided.
本公开提供一种天车装置及物料搬送装置。该天车装置包括行驶组件、抓取组件、升降机构、第一检测装置以及控制装置。该行驶组件能够沿着悬空设置的轨道移动。该抓取组件用于抓取或松开晶圆盒。该升降机构连接于行驶组件与抓取组件之间,用于驱动抓取组件在竖直方向上移动。该第一检测装置在水平方向上位于抓取组件的一侧,并与抓取组件连接,用于检测第一检测装置正下方的预设范围内是否存在障碍物,且在第一检测装置正下方的预设范围内存在障碍物时,发出第一信号。该控制装置用于在接收到第一信号时,控制抓取组件保持松开状态。本公开能够避免由于晶圆盒的盖体未关闭所引发的安全事故。
Overhead hoist transfer and material conveying device
天车装置及物料搬送装置
2020-05-19
Patent
Electronic Resource
Chinese
IPC: | B66C Krane , CRANES |
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