Micromachined silicon accelerometers
Microbearbeitete Silicon-Beschleunigungsmesser.
Automot.Engng. ; 97 , 10
1989
1 pages
Automot.Engng.;97(1989)10;87-88
Article (Journal)
English
Silicon micromachined accelerometers for space inertial systems
Tema Archive | 1999
|A multilayer ceramic package for silicon micromachined accelerometers
Tema Archive | 1995
|BRIEFS - Special Coverage: Sensors - Surface Micromachined Silicon Carbide Accelerometers
Online Contents | 2000
Micromachined Accelerometers for Inertial Navigation Applications
SAE Technical Papers | 2005
|Micromachined accelerometers for inertial navigation applications
Automotive engineering | 2005
|