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    Title :

    Daempfungssimulation bei aktiv geregelten Komponenten in der Halbleiterindustrie


    Additional title:

    Damping simulation at active controlled components in semiconductor industry.



    Publication date :

    2015


    Size :

    12 pages


    Remarks:

    VDI-Ber.; 2015;3.VDI Fachtagung Schwingungsdaempfung (Leonberg September 2015);VDI-Berichte;Nr.;2261


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    German