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    Title :

    Modeling and analysis of MEMS in multi-physics fields


    Additional title:

    Die Modellierung und Analyse von mikrosystemtechnischen Systemen in mehreren physikalischen Domaenen.


    Contributors:

    Publication date :

    2007


    Size :

    9 pages


    Remarks:

    SAE-Paper;2007-01-0404;2007;Vehicle Sensors and Actuators;SAE Spec.Publ.; SP-2124


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Modeling and Analysis of MEMS in Multi-Physics Fields

    Beloiu, D. M. / Society of Automotive Engineers | British Library Conference Proceedings | 2007


    Modeling and Analysis of MEMS in Multi-Physics Fields

    Beloiu, Dumitru M. | SAE Technical Papers | 2007


    2007-01-0404 Modeling and Analysis of MEMS in Multi-Physics Fields

    Beloiu, D. M. / Society of Automotive Engineers | British Library Conference Proceedings | 2007



    Dynamic modeling of interactions between fields and matter in MEMS devices

    Zeng, K. / Liu, Z. / Korvink, J. G. | British Library Online Contents | 2004