Mikrooptisches Silizium Mikrofon mit Fabry Perot Cavity
Micro optical silicon microphone with Fabry Perot cavity.
2004
9 pages
VDI-Ber.; 2004;Sensoren und Messysteme (Tag.Ludwigsburg, Maerz 2004);VDI-Berichte;Nr.;1829
Miscellaneous
German
MEMS: Silizium-Mikrofon mit geringem Stromverbrauch
British Library Online Contents | 2006
Light Squeezing in a Fabry-Perot Cavity
British Library Online Contents | 2004
|British Library Online Contents | 2013
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