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    Title :

    Stiction recovery of microcantilevers by using excimer laser irradiation


    Contributors:

    Conference:

    7th AIAA/ASME Joint Thermophysics and Heat Transfer Conference ; 1998 ; Albuquerque , NM , U.S.A.



    Publication date :

    1998-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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