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    Title :

    MEMS low cost inertial grade accelerometers and gyros using a common, bulk micromachining process


    Contributors:
    Stewart, R. (author) / Abbink, H. (author) / Goldman, A. (author) / Patterson, R. (author)

    Conference:

    Guidance, Navigation, and Control Conference and Exhibit ; 1999 ; Portland , OR , U.S.A.



    Publication date :

    1999-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    MEMS Low Cost Inertial Grade Accelerometers and Gyros Using a Common, Bulk Micromachining Process

    Stewart, R. / Abbink, H. / Goldman, A. et al. | British Library Conference Proceedings | 1999


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