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    Title :

    Role of boundary conditions in Monte Carlo simulation of MEMS devices


    Contributors:
    Nance, Robert (author) / Hassan, H. (author) / Hash, David (author)

    Conference:

    35th Aerospace Sciences Meeting and Exhibit ; 1997 ; Reno , NV , U.S.A.



    Publication date :

    1997-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English