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    Title :

    Damage Free Plasma Etching of SiC Power Electronics Device


    Contributors:
    Scofield, J. (author) / Ganguly, B. (author) / Bletzinger, P. (author)

    Conference:

    37th AIAA Plasmadynamics and Lasers Conference



    Publication date :

    2006-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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