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    Title :

    Advances in resist technology and processing VIII : 4 - 5 March 1991, San Jose, California



    Conference:

    Advances in Resist Technology and Processing Conference ; 8 ; 1991 ; San Jose, Calif. Advances in Resist Technology and Processing Conference ; 8 (San Jose, Calif.) : 1991.03.04-05



    Publication date :

    1991


    Size :

    XII, 679 S


    Remarks:

    Ill., graph. Darst
    Lieteraturangaben
    Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek



    Type of media :

    Conference Proceedings


    Type of material :

    Print


    Language :

    English



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