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    Title :

    Abscheidung dünner Isolationsschichten aus der Gasphase




    Publication date :

    1976


    Size :

    88 S


    Remarks:

    Ill., graph. Darst
    Literaturverz. S. 66 - 67


    Type of media :

    Report


    Type of material :

    Print


    Language :

    German