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    Title :

    Simulation, Fabrication, and Characterization of a Sensitive SU-8-Based Fabry-Pérot MOEMS Accelerometer



    Published in:

    Publication date :

    2019-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692





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