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    Title :

    Porous silicon micro-resonator implemented by standard photolithography process for sensing application


    Contributors:
    Girault, P. (author) / Azuelos, P. (author) / Lorrain, N. (author) / Poffo, L. (author) / Lemaitre, J. (author) / Pirasteh, P. (author) / Hardy, I. (author) / Thual, M. (author) / Guendouz, M. (author) / Charrier, J. (author)

    Published in:

    Optical materials ; 72 ; 596-601


    Publication date :

    2017-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    535



    Porous silicon micro-resonator implemented by standard photolithography process for sensing application

    Girault, P. / Azuelos, P. / Lorrain, N. et al. | British Library Online Contents | 2017



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    Ang, Thomas Y. L / Lim, Soon Thor / Lee, Shuh Ying et al. | IEEE | 2008


    Photolithography at 193nm

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1996