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    Title :

    A Miniature Fiber-Optic Microphone Based on an Annular Corrugated MEMS Diaphragm


    Contributors:
    Lu, X. (author) / Wu, Y. (author) / Gong, Y. (author) / Rao, Y. (author)

    Published in:

    JOURNAL OF LIGHTWAVE TECHNOLOGY ; 36 , 22 ; 5224-5229


    Publication date :

    2018-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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