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    Title :

    An effective on-line surface particles inspection instrument for large aperture optical element


    Contributors:
    Ding, W. D. (author) / Zhang, Z. T. (author) / Zhang, D. P. (author) / Xu, D. (author) / Lv, H. B. (author) / Miao, X. X. (author) / Zhou, G. R. (author) / Liu, H. (author)


    Publication date :

    2017-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.8



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