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    Title :

    Through silicon via based metal-semiconductor-metal photodetector in CMOS technology


    Contributors:
    Pil-Ali, A. (author) / Karami, M. A. (author)

    Published in:

    Publication date :

    2016-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    537.5



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