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    Title :

    Local thermal-assisted ultrasonic embossing for the fabrication of polymer microstructures


    Contributors:
    Qi, N. (author) / Luo, Y. (author) / Wang, X. d. (author) / Wang, L. d. (author) / Zhang, Z. b. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 5 ; 1101-1110


    Publication date :

    2015-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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