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    Title :

    A new silicon biaxial decoupled resonant micro-accelerometer


    Contributors:
    Yang, B. (author) / Zhao, H. (author) / Dai, B. (author) / Liu, X. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 1 ; 109-115


    Publication date :

    2015-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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