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    Title :

    Novel piezoelectric actuator control slider using transverse-mode deformation


    Contributors:
    Shen, S. (author) / Li, H. (author) / Du, H. (author) / Liu, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 12 ; 2271-2276


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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