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    Title :

    Replication processes for metal and ceramic micro parts


    Contributors:
    Piotter, V. (author) / Honza, E. (author) / Klein, A. (author) / Mueller, T. (author) / Plewa, K. (author) / Prokop, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2011-2016


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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