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    Title :

    Direct imprinting of organic–inorganic hybrid materials into high aspect ratio sub-100 nm structures


    Contributors:
    Cadarso, V. J. (author) / Kiefer, T. (author) / Auzelyte, V. (author) / Atasoy, H. (author) / Gruetzner, G. (author) / Brugger, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 1961-1966


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Peterson, John B., Jr. | NTRS | 1988


    Overcoming SU-8 stiction in high aspect ratio structures

    Peele, A. G. / Shew, B. Y. / Vora, K. D. et al. | British Library Online Contents | 2005


    High aspect ratio wings

    Bruner, G. | Engineering Index Backfile | 1950