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    Title :

    Design, fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump


    Contributors:
    Feth, H. (author) / Pothof, F. (author) / Thoma, F. (author) / Schmidt, T. (author) / Mueller, C. (author) / Goldschmidtboeing, F. (author) / Woias, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 7 ; 1299-1310


    Publication date :

    2014-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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