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    Title :

    Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography


    Contributors:
    Park, S.-H. (author) / Kim, T.-W. (author) / Lee, J.-H. (author) / Pahk, H.-J. (author)

    Published in:

    Publication date :

    2014-01-01


    Size :

    13001 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    535.84



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