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    Title :

    Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement


    Contributors:
    Frank, T. (author) / Doering, L. (author) / Heinrich, G. (author) / Thronicke, N. (author) / Löbner, C. (author) / Völlmeke, S. (author) / Steinke, A. (author) / Reich, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 4/5 ; 927-931


    Publication date :

    2014-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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