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    Title :

    Microfabrication of thin film temperature sensor for cryogenic measurement


    Contributors:
    Jiang, S. D. (author) / Liu, J. Q. (author) / Yang, B. (author) / Zhu, H. Y. (author) / Yang, C. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 3 ; 451-456


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Cryogenic temperature measurement

    Malone, J. H. / Sinclair, D. H. / Terbeek, H. G. | NTRS | 1970


    Cryogenic temperature measurement

    Malone, J. H. / Sinclair, D. H. / Terbeek, H. G. | NTRS | 1970


    Cryogenic Temperature Measurement

    J. H. Malone / D. H. Sinclair / H. G. Terbeek | NTIS | 1970


    Investigation Upon Mechanical Properties of Thin Film Silicon Under Cryogenic Temperature

    Zhao, Y. / Zhang, X. / Materials Research Society | British Library Conference Proceedings | 2005


    Polymer microfabrication technologies

    Rotting, O. / Ropke, W. / Becker, H. et al. | British Library Online Contents | 2002