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    Title :

    Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy


    Contributors:
    Fukuzawa, K. (author) / Tsuji, H. (author) / Hamaoka, S. (author) / Shikida, M. (author) / Itoh, S. (author) / Zhang, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 9-10 ; 1567-1572


    Publication date :

    2013-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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