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    Title :

    The 4th ASME-ISPS/JSME-IIP joint international conference on micromechatronics for information and precision equipment, Santa Clara, California, USA


    Contributors:
    Ong, E. H. (author) / Fukuzawa, K. (author) / Chang, J. Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 9-10 ; 1267-1268


    Publication date :

    2013-01-01


    Size :

    2 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83