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    Title :

    Effects of package on the performance of MEMS piezoresistive accelerometers


    Contributors:
    Li, P. (author) / Gao, S. (author) / Liu, H. (author) / Liu, J. (author) / Shi, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 8 ; 1137-1144


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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