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    Title :

    Deadlock Avoidance Scheduling for Dual-armed Cluster Tools by Petri Net Decomposition Approach


    Contributors:
    Matsumoto, I. (author) / Nishi, T. (author) / Inuiguchi, M. (author)


    Publication date :

    2013-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    629.8



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