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    Title :

    RF MEMS switches fabrication by using SU-8 technology


    Contributors:
    Lucibello, A. (author) / Proietti, E. (author) / Giacomozzi, F. (author) / Marcelli, R. (author) / Bartolucci, G. (author) / Angelis, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 6 ; 929-936


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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