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    Title :

    Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies


    Contributors:
    Mekaru, H. (author) / Okuyama, C. (author) / Ueno, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 3 ; 315-323


    Publication date :

    2013-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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