Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker


    Contributors:
    Shahosseini, I. (author) / Lefeuvre, E. (author) / Martincic, E. (author) / Woytasik, M. (author) / Moulin, J. (author) / Megherbi, S. (author) / Ravaud, R. (author) / Lemarquand, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 11 ; 1791-1799


    Publication date :

    2012-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Electromagnetic MEMS microspeaker for portable electronic devices

    Shahosseini, I. / Lefeuvre, E. / Moulin, J. et al. | British Library Online Contents | 2013



    Progress in soft glass microstructured fibres

    Ebendorff-Heidepriem, H. / Monro, T. | IEEE | 2005


    Progress in Soft Glass Microstructured Fibres

    IEEE Lasers and Electro-optics Society | British Library Conference Proceedings | 2005


    Design and Fabrication of Microstructured Optical Fibers With Optimized Core Suspension for Enhanced Supercontinuum Generation

    Ghosh, Debashri / Bose, Surajit / Roy, Samudra et al. | British Library Online Contents | 2015