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    Title :

    A novel DMTL capacitive switch with electrostatic actuation MAM capacitors


    Contributors:
    Deng, C. (author) / Bao, J. (author) / Du, Y. (author) / Zhao, X. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 5 ; 537-541


    Publication date :

    2012-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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