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    Title :

    Modeling analysis of a triaxial microaccelerometer with piezoelectric thin-film sensing using energy method


    Contributors:
    Yu, J. C. (author) / Lee, C. (author) / Kuo, W. (author) / Chang, C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 4 ; 483-493


    Publication date :

    2011-01-01


    Size :

    11 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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