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    Title :

    Geometric optimization of van der Pauw structure based MEMS pressure sensor


    Contributors:
    Mian, A. (author) / Law, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 11 ; 1921-1929


    Publication date :

    2010-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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