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    Title :

    Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding


    Contributors:
    Queste, S. (author) / Salut, R. (author) / Clatot, S. (author) / Rauch, J. Y. (author) / Khan Malek, C. G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 8-9 ; 1485-1493


    Publication date :

    2010-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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