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    Title :

    Design issues of BAW employment in 3D integrated sensor nodes


    Contributors:
    Prainsack, J. (author) / Dielacher, M. (author) / Flatscher, M. (author) / Herndl, T. (author) / Matischek, R. (author) / Stolle, J. (author) / Weber, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 7 ; 1037-1043


    Publication date :

    2010-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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