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    Title :

    Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode


    Contributors:
    Ito, R. (author) / Wakui, M. (author) / Sameshima, H. (author) / Hu, F. R. (author) / Hane, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 6 ; 1015-1020


    Publication date :

    2010-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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