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    Title :

    MOEMS translatory actuator characterisation, position encoding and closed-loop control


    Contributors:
    Lenzhofer, M. (author) / Tortschanoff, A. (author) / Frank, A. (author) / Sandner, T. (author) / Schenk, H. (author) / Kraft, M. (author) / Kenda, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 5 ; 901-907


    Publication date :

    2010-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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